Aluminum Nitride (AlN) Ceramics

Aluminum Nitride (AlN) has attractive thermal and electrical properties and it make AlN a very promising material for electronic substrates such as electrostatic chuck. We investigated bulk AlN crystals using Raman spectroscopy in order to characterize their defects and thermal conductivity. We studied the correlation between the width of the E2(high) phonon of AlN and lattice thermal conductivity as measured by the laser flash method. Raman spectroscopy is a good candidate for a nondestructive assessment tool for the thermal conductivity of bulk AlN ceramics.